Inficon Guardian EIES Controller manuales

Manuales del propietario y guías del usuario para Equipo Inficon Guardian EIES Controller.
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Inficon Guardian EIES Controller Manual de usuario (160 paginas)

Marca: Inficon | Categoria: Equipo | Tamaño: 10.06 MB |

Tabla de contenidos

Guardian

Trademarks

Disclaimer

Warranty

Table Of Contents

TOC - 2

Chapter 3

EIES Software

TOC - 3

TOC - 4

Chapter 4

Installation

TOC - 5

Chapter 1

1.2 EIES Controller

1.3 EIES Sensor

1.4 EIES Detector

1.5 EIES Software

1.6 Quartz Crystal Monitor

1.7 Analog Measurements

1.8 Specifications

1.8.1 Sensor

1.8.2 Detector

1.8.3 Controller

1 - 10

2.1 Introduction

2.2 Installation

2.2.1 Sensor Installation

016-205-P2

Standard Rate Cover

016-205-P1

High Rate Cover

2.3 EIES Software

2.3.1 Software Installation

2.3.2 EIES Main Screen

Figure 2-4 Readings Display

2.3.3 Edit Film

2.3.4 Edit Processes

2 - 10

2.3.5 Edit Layer

2 - 12

Figure 2-11

2 - 14

2 - 15

Figure 2-13 Edit Process

2.3.6 Views

2.3.7 Software Summary

2.4 Initial Setup

2.4.1 Power-up Sequence

2.4.2 Communications

2.4.3 Detector Calibration

2.4.4 Sensor Setup

2.4.5 QCM Option

2.4.6 Digital I/O

2.5 Operation

2.5.2 Setup Layer Parameters

2 - 24

2.5.3 Start Deposition

2 - 26

2.5.4 Manual Calibration

2.5.5 QCM Calibration

2.5.6 Stop Deposition

2 - 28

3.1 Introduction

3.2 Installation

3.3 Main Screen

3.3.1 Status Panel

3.3.2 Control Panel

Figure 3-9 Ratio Mode

3 - 10

3.3.6 Menu

3.4 File Menu

3 - 12

3.4.7 File >> Exit

3.5 Edit Process

3 - 15

3.6 Edit Layer

3.6.1 Layer Grid

3.6.2 Rate Ramps Grid

3 - 19

3.6.4 Ratio Display Grid

3.6.5 Edit Layer Film Tab

3 - 22

3 - 23

3.6.6 Edit Layer Film Cal

3 - 25

3 - 26

3.7 Edit: Film

3.7.1 Deposit Grid

3.7.2 Condition Grid

3.7.3 Film Cal(ibration) Tab

3.8 Edit >> System

3.8.1 Channel Tab

3.8.2 Sensor Tab

3.8.3 QCM Tab

3 - 32

3.8.4 Digital I/O Tab

3 - 34

3.8.5 Comm Tab

3 - 36

3.8.6 Display Tab

3.9 View Menu

3.9.2 Graph Selection

3 - 39

Figure 3-31 View Setup

3 - 40

4.1 Introduction

4.2.1 Sensor Position

4.2.2 Sensor Covers

Small Cutout

Large Cutout

2.75 in. Flange

4.2.4 Sensor Filament Cables

4.3 Detector

4.3.1 Detector Cable(s)

IPN 074-517-P1D

100

4 - 11

103

Figure 4-11 Beam Splitter

103

4.4 Optical Filters

104

4.5.1 RS232 Serial Interface

105

4.5 Computer Connections

105

4 - 14

106

4 - 15

107

4 - 16

108

4.6 Controller Installation

109

4.6.2 Relay Connector Pinout

110

4.6.3 Input Connector Pinout

111

4.6.4 Sensor(s)

112

4.6.5 Control Outputs

113

4.6.6 Computer

113

4.6.7 Mains Power

114

4 - 23

115

4.8 Monochromator Option

116

4 - 25

117

4 - 26

118

Chapter 5

119

5.3 Sensor Maintenance

120

5.3.1 Sensor Cleaning

120

5.4 Chassis Cleaning

123

5.5 Troubleshooting

123

6.1 Introduction

125

6.2.1 Sensor

125

6.2.2 Optical Discrimination

127

6.2.3 Detector

128

6.3.1 Density

129

6.3.2 Z-Ratio or Z-Factor

129

6.3.3 Tooling Factor

131

6.4 EIES Calibration

132

6.4.1 Detector Calibration

132

6.4.2 PMT Voltage Selection

132

6.4.3 Zero Calibration

133

6.4.5 Gain Calibration - QCM

134

6.5 Loop Tuning

135

6 - 12

136

6 - 13

137

6 - 14

138

Chapter 7

139

Communications

139

35 User Units

143

38 Exponent

143

7.3.1 Serial Interface

146

7.3.2 Ethernet Interface

146

7 - 10

148

7 - 11

149

7 - 12

150

7 - 13

151

7 - 14

152

7 - 15

153

7 - 16

154

Appendix A

155

Material Optical Parameters

155

Appendix B

157

Material QCM Parameters

157

Index - 1

159

IPN 074-517-P1C

160

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Inficon Guardian EIES Controller manuales

Inficon Guardian EIES Controller Manual de usuario (160 paginas)

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