Inficon T-Guard Leak Detection Sensor Manual de usuario descargar pdf (Pagina 15)

Description 13

jina85e 3.fm Technical Handbook(1112)

3.3 Vacuum diagram

On top of the vacuum diagram, there are the measurement inlet "IN" and the

reference inlet "Ref". Both inlets are equipped with an external filter to protect T-

Guard™ Leak Detection Sensor from sucking in dust or fluids. Three valves are

integrated in the T Guard™ Leak Detection Sensor (see Fig. 4-5).

Valve V1 opens and closes the measurement inlet. Valve V3 opens and closes the

reference inlet. Valve V2 opens and closes the connection between V1 and V3.

These three valves are connected to two flow-restricted capillaries which lead to the

Wise Technology™ Sensor.

The upper inlet of the Wise Technology™ Sensor is the fine inlet, the lower one is

the gross inlet, which is less sensitive to helium than the fine inlet.

The Wise Technology™ Sensor detects the helium in the gas stream, which passes

by. The total pressure, which is applied to the Wise Technology™ Sensor is detected

by the Pressure Gauge p1.

The fore pump, which provides the gas stream inside T-Guard™ Leak Detection

Sensor is also throttled to produce constant pressure and flow for the Wise Techno-

logy™ Sensor.

Fig. 4-5 Vacuum diagram of the T-Guard™ Leak Detection Sensor

Item Description Item Description

1 Inlet “IN” 8 Pressure gauge p1

2 Reference “Ref” 9 Pump

3 Filter 2 10 Pump connector “OUT”

4 Valve V

11 Throttle 3

5 Valve V

12 Throttle 1

6 Throttle 2 13 Valve V

7 Wise Technology™ Sensor 14 Filter 1

1 2 ... 10 11 12 13 14 15 16 17 18 19 20 ... 84 85

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Inficon T-Guard Leak Detection Sensor Manual de usuario Pagina 15