Inficon Maxtek PM-700 Plating Monitor Manual de usuario descargar pdf (Pagina 4)

Table of Contents

1. GENERAL DESCRIPTION .................................................................................................1

1.1 SPECIFICATIONS ...................................................................................................................2

2. UNPACKING, INSPECTION AND BENCH CHECKOUT .............................................5

2.1 UNPACKING, INSPECTION.....................................................................................................5

2.2 BENCH CHECKOUT...............................................................................................................5

3. SIMPLIFIED OPERATION...............................................................................................13

3.1 SAMPLE PROCESS ..............................................................................................................15

4. DETAILED OPERATION..................................................................................................18

4.1 INTRODUCTION AND GENERAL CONCEPTS .........................................................................18

4.2 DISPLAYS...........................................................................................................................18

4.3 BUTTONS ...........................................................................................................................18

4.4 OPERATION ........................................................................................................................20

4.4.1 Monitor Operating States.............................................................................................21

4.4.1.1 Electroless plating ............................................................................................................21

4.4.1.1.1 Ready State .................................................................................................................21

4.4.1.1.2 Preplate State ..............................................................................................................21

4.4.1.1.3 Plate State ...................................................................................................................21

4.4.1.1.4 Deplate State...............................................................................................................21

4.4.1.1.5 Endpoint State.............................................................................................................21

4.4.1.2 Electrolytic plating ...........................................................................................................22

4.4.1.2.1 Ready State .................................................................................................................22

4.4.1.2.2 Plate State ...................................................................................................................22

4.4.1.2.3 Deplate State...............................................................................................................22

4.4.1.2.4 Endpoint State.............................................................................................................22

4.4.2 Monitor Measurement Modes ......................................................................................22

4.4.2.1 Single Probe Measurement Modes...................................................................................22

4.4.2.1.1 Continuous..................................................................................................................22

4.4.2.1.2 Sample.........................................................................................................................23

4.4.2.1.3 Sample with Deplate ...................................................................................................23

4.4.2.2 Dual Probe Measurement Modes .....................................................................................23

4.4.2.2.1 Auto Probe Swap ........................................................................................................23

4.4.2.2.2 Alternating Measurement mode ..................................................................................23

4.4.2.2.3 Dual Probe Measurement mode ..................................................................................23

4.4.3 Probe States and Modes...............................................................................................24

4.4.3.1 Probe States......................................................................................................................24

4.4.3.1.1 Failed state. .................................................................................................................24

4.4.3.1.2 Standby state...............................................................................................................24

4.4.3.1.3 Active state..................................................................................................................24

4.4.3.2 Probe modes.....................................................................................................................24

4.4.3.2.1 Ready mode.................................................................................................................24

4.4.3.2.2 Hold mode...................................................................................................................24

4.4.3.2.3 Deplate mode ..............................................................................................................25

4.4.3.2.4 Preplate mode..............................................................................................................25

4.4.3.2.5 Plate mode...................................................................................................................25

4.4.4 Main Display modes.....................................................................................................25

4.4.4.1 Rate and Thickness...........................................................................................................25

4.4.4.2 Rate and Efficiency ..........................................................................................................25

4.4.4.3 Efficiency and Thickness..................................................................................................25

4.4.4.4 Frequency.........................................................................................................................26

4.4.5 Parameter/Status Display modes .................................................................................26

4.4.5.1 Status Display...................................................................................................................26

4.4.5.2 Frequency Display............................................................................................................26

4.4.5.3 Elapsed Time Display.......................................................................................................26

4.4.5.4 Time to Go Display ..........................................................................................................26

4.4.5.5 Current Density Display...................................................................................................26

1 2 3 4 5 6 7 8 9 ... 82 83

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Inficon Maxtek PM-700 Plating Monitor Manual de usuario Pagina 4

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