Inficon Maxtek PM-700 Plating Monitor Manual de usuario descargar pdf (Pagina 57)

PM-700 SERIES PLATING MONITOR

4.8.4.3 Remote Control

4.8.4.3.1 Upload Parameter Store (Instruction 10h)

This operation outputs the entire parameter store from the monitor to the host

computer. All the parameters are output with the most significant byte first. The

parameters are output in the following order:

Table 7 Upload Parameter Store

No. Position Description Length

(Bytes)

Decimal

Point Pos.

1 1 Plate endpoint 3 *

2 4 Preplate endpoint 3 *

3 7 Minimum rate alarm 3 *

4 10 Maximum rate alarm 3 *

5 13 Preplate rate 3 *

6 16 Dwell time in % 3 3

7 19 Interval time (seconds) 3 N/A

8 22 Deplate rate 3 *

9 25 Tooling factor % 3 1

10 28 Material density (gm/cm

) 3 1

11 31 Acoustic imp. [10

gm/(cm

sec)] 3 1

12 34 Electrochemical eqv. (gm/Amphr) 3 1

13 37 DAC thickness range 3 *

14 40 DAC low rate 3 *

15 43 DAC high rate 3 *

16 46

Simulate rate (µg/cm

/min)

3 1

17 49 Plate current density 3 *

18 52 Deplate thickness % 3 3

19 55 Electrode area in cm

3 1

20 58 Plating material 1 N/A

21 59 Sample (On|Off) 1 N/A

22 60 Bath type(Electro|Elecless) 1 N/A

23 61 Main display 1 N/A

1 2 ... 52 53 54 55 56 57 58 59 60 61 62 ... 82 83

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Inficon Maxtek PM-700 Plating Monitor Manual de usuario Pagina 57