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Inficon Front Load Single Sensor manuales

Manuales del propietario y guías del usuario para Equipo Inficon Front Load Single Sensor.
Ofrecemos 1 manuales en pdf Inficon Front Load Single Sensor para descargar gratis por tipos de documentos: Manual de usuario


Inficon Front Load Single Sensor Manual de usuario (90 paginas)


Marca: Inficon | Categoria: Equipo | Tamaño: 5.89 MB |

 

Tabla de contenidos

Front Load Single and Dual

1

Trademarks

4

Disclaimer

4

Copyright

4

Warranty

5

Table Of Contents

7

Chapter 5

9

Troubleshooting

9

TOC - 4

10

Chapter 1

11

Introduction

11

1.3 How to Contact INFICON

12

1.4 Unpacking and Inspection

13

PN 074-156N

14

Figure 1-4 Standard sensor

16

1.5.1 Specifications

17

1.5.2 Materials

18

1.5.4 Single Sensor Drawings

19

1.6.1 Specifications

24

1.6.2 Materials

25

1.6.4 Dual Sensor Drawings

26

1.7.1 Specifications

29

1.8 Feedthroughs

33

1.8.3 Feedthrough Drawings

35

Dimensions are shown

36

PN 750-420-G1 Solenoid Valve

37

6.73 (0.26) Diameter

40

Six holes equally spaced

40

0.26 (6.73) Diameter

43

Deposition Controller

47

or STM-2 Deposition Monitor

49

2.1.4 Sensor Shutter Check

50

(25.4 cm (10 in.) minimum)

51

Obstruction

52

2.3.1 Tube Bending

56

Chapter 3

59

3.4 Pneumatic Connections

62

3.5 Electrical Connections

62

3.6 Solenoid Valve Drawings

62

Figure 3-2 Solenoid valve

63

Chapter 4

65

Maintenance and Spare Parts

65

4.3 Sensor Maintenance

69

Figure 4-8 Lubrication guide

73

5.1.1 Symptom, Cause, Remedy

77

5.1.2 Digital Multimeter

79

Figure 5-1 Resistance check

80

Figure 5-4 Leaf spring

83

In-Vacuum

87




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