Inficon Front Load Single Sensor Manual de usuario descargar pdf (Pagina 80)

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PN 074-156N

Front Load Single and Dual Sensors Operating Manual

5.1.2.1 Electrical Isolation Check

1 Remove the Crystal Holder from the sensor head.

2 Disconnect the short BNC cable from the feedthrough.

3 Select the DMM ohmmeter function and high resistance (MΩ) scale.

4 At the feedthrough, measure resistance between center contact and shield of

the BNC connector (shown by Figure 5-1).

 If resistance is more than 10 MΩ, electrical isolation is good. Go to section

5.1.2.2, Electrical Continuity Check, on page 5-6.

 If resistance is less than 10 MΩ, continue to step 5.

Figure 5-1 Resistance check

5 Disconnect the in-vacuum cable from the sensor head.

6 Measure resistance between center contact and shield of the BNC.

 If resistance is less than 10 MΩ, continue to step 7.

 If resistance is more than 10 MΩ, continue to step 6a.

6a Measure resistance between the center contact and threads of the coaxial

connector on the sensor head (shown by Figure 5-2). If resistance across the

coaxial connector is less than 10 MΩ, examine the sensor head cavity and

coaxial connector for the cause of the low resistance. Contact INFICON if

cause of low resistance is not found (refer to section 1.3, How to Contact

INFICON, on page 1-2).

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Inficon Front Load Single Sensor Manual de usuario Pagina 80