Inficon Front Load Single Sensor Manual de usuario descargar pdf (Pagina 87)

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PN 074-156N

Front Load Single and Dual Sensors Operating Manual

Figure 5-8 Crystal Sensor Emulator attachment points

5.1.3.1 Measurement System Check

1 Refer to Figure 5-8. Remove the 15.2 cm (6 in.) BNC cable from the

feedthrough at point A.

2 Connect the Crystal Sensor Emulator to the 15.2 cm (6 in.) BNC cable

at point A.

 If the Crystal Fail message disappears after approximately five seconds,

the sensor or feedthrough is the cause of the Crystal Fail. Reinstall the 15.2

cm (6 in.) BNC cable to the feedthrough and proceed to section 5.1.3.2.

 If the Crystal Fail message remains, the controller / monitor, or XIU /

oscillator, or their associated cables are the cause of the Crystal Fail. Refer

to the controller or monitor operating manual for troubleshooting

information.

Thin Film

Controller

Crystal Interface

Unit (Oscillator)

Sensor Head

In-Vacuum

cable

Crystal

Holder

BNC

Cable

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Inficon Front Load Single Sensor Manual de usuario Pagina 87