Inficon Front Load Single Sensor Manual de usuario Pagina 8
- Pagina / 90
- Tabla de contenidos
- SOLUCIÓN DE PROBLEMAS
- MARCADORES
Valorado. / 5. Basado en revisión del cliente
TOC - 2
PN 074-156N
Front Load Single and Dual Sensors Operating Manua
Chapter 2
Sensor Installation
2.1 Pre-installation Sensor Check . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-1
2.1.1 Sensor Check with XTC/3, IC6, or Cygnus 2
Deposition Controller . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-1
2.1.2 Sensor Check with STM-2XM, STM-3, SQM-160, SQC-310,
SQM-242, or IQM-233 Deposition Controller/Monitor . . . . . . . . . . . . . . . . . 2-2
2.1.3 Sensor Check with Q-pod
™
or STM-2 Deposition Monitor. . . . . . . . . . . . . . 2-3
2.1.4 Sensor Shutter Check . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-4
2.2 Sensor Installation Guidelines . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-4
2.3 Sensor Installation Procedure . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-7
2.3.1 Tube Bending . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-10
2.4 Sensor Shutter Module Installation on Existing Equipment . . . . . . . . . . . . 2-11
2.4.1 Shutter Module Installation on a
Standard Crystal Sensor (PN SL-A0XXX) . . . . . . . . . . . . . . . . . . . . . . . . . 2-11
2.4.2 Shutter Module Installation on a
Right Angle Crystal Sensor (PN SL-B0XXX) . . . . . . . . . . . . . . . . . . . . . . . 2-11
Chapter 3
Solenoid Valve Assembly Installation
3.1 Introduction. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-1
3.2 Installation with a 2.54 cm (1 in.) Bolt Feedthrough . . . . . . . . . . . . . . . . . . . 3-1
3.3 Installation with a CF40 (2-3/4 in. ConFlat) Feedthrough. . . . . . . . . . . . . . . 3-2
3.4 Pneumatic Connections . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-4
3.5 Electrical Connections . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-4
3.6 Solenoid Valve Drawings . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-4
Chapter 4
Maintenance and Spare Parts
4.1 General Precautions. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-1
4.1.1 Handle the Crystal with Care . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-1
4.1.2 Use the Optimum Crystal Type . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-1
4.1.3 Maintain the Temperature of the Crystal . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-2
4.1.4 Crystal Concerns when Opening the Chamber . . . . . . . . . . . . . . . . . . . . . . 4-2
4.2 Crystal Replacement Instructions. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-2
4.3 Sensor Maintenance . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-5
4.3.1 Adjusting the Leaf Spring . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-5
4.3.2 Cleaning the Crystal Holder . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-6
4.3.3 Adjusting the Crystal Holder Retainer Spring. . . . . . . . . . . . . . . . . . . . . . . . 4-7
4.3.4 Replacing the Finger Spring. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-8
4.3.5 Lubricating the Shutter Module . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-9
4.4 Spare Parts and Accessories. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-10
- Front Load Single and Dual 1
- Trademarks 4
- Disclaimer 4
- Copyright 4
- Warranty 5
- Table Of Contents 7
- Chapter 5 9
- Troubleshooting 9
- TOC - 4 10
- Chapter 1 11
- Introduction 11
- 1.3 How to Contact INFICON 12
- 1.4 Unpacking and Inspection 13
- PN 074-156N 14
- Figure 1-4 Standard sensor 16
- 1.5.1 Specifications 17
- 1.5.2 Materials 18
- 1.5.4 Single Sensor Drawings 19
- 1.6.1 Specifications 24
- 1.6.2 Materials 25
- 1.6.4 Dual Sensor Drawings 26
- 1.7.1 Specifications 29
- 1.8 Feedthroughs 33
- 1.8.3 Feedthrough Drawings 35
- Dimensions are shown 36
- PN 750-420-G1 Solenoid Valve 37
- 6.73 (0.26) Diameter 40
- Six holes equally spaced 40
- 0.26 (6.73) Diameter 43
- Deposition Controller 47
- or STM-2 Deposition Monitor 49
- 2.1.4 Sensor Shutter Check 50
- (25.4 cm (10 in.) minimum) 51
- Obstruction 52
- 2.3.1 Tube Bending 56
- Chapter 3 59
- 3.4 Pneumatic Connections 62
- 3.5 Electrical Connections 62
- 3.6 Solenoid Valve Drawings 62
- Figure 3-2 Solenoid valve 63
- Chapter 4 65
- Maintenance and Spare Parts 65
- 4.3 Sensor Maintenance 69
- Figure 4-8 Lubrication guide 73
- 5.1.1 Symptom, Cause, Remedy 77
- 5.1.2 Digital Multimeter 79
- Figure 5-1 Resistance check 80
- Figure 5-4 Leaf spring 83
- In-Vacuum 87
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