Inficon Front Load Single Sensor Manual de usuario descargar pdf (Pagina 81)

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PN 074-156N

Front Load Single and Dual Sensors Operating Manual

Figure 5-2 Sensor head isolation check

7 Disconnect the in-vacuum cable from the feedthrough.

8 Measure resistance between center contact and shield of the BNC.

 If resistance is less than 10 MΩ, continue to step 8a.

 If resistance is more than 10 MΩ, continue to step 9.

8a Examine the feedthrough for the cause of the low resistance. Contact INFICON

if cause of low resistance is not found (refer to section 1.3, How to Contact

INFICON, on page 1-2).

9 Replace the in-vacuum cable.

10 Measure resistance between center contact and shield of the BNC.

 If resistance is more than 10 MΩ, electrical isolation is good. Go to section

5.1.2.2, Electrical Continuity Check, on page 5-6.

 If resistance is less than 10 MΩ, contact INFICON.

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Inficon Front Load Single Sensor Manual de usuario Pagina 81