Inficon Front Load Single Sensor Manual de usuario descargar pdf (Pagina 25)

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PN 074-156N

Front Load Single and Dual Sensors Operating Manual

1.6.2 Materials

Body and Holder . . . . . . . . . . . . . . . 304 stainless steel

Springs, Electrical Contacts . . . . . . . Au plated Be-Cu

Water Tubes and Air Tube . . . . . . . . 304 stainless steel

In-Vacuum Cable . . . . . . . . . . . . . . . Silver coated copper, Teflon

insulated

Electrical Connector . . . . . . . . . . . . . Glass insulated

Insulators . . . . . . . . . . . . . . . . . . . . . >99% Al

Other Mechanical Parts . . . . . . . . . . 304 or 18-8 stainless steel

Braze . . . . . . . . . . . . . . . . . . . . . . . . Vacuum process high temperature

Ni-Cr alloy

1.6.3 Installation Requirements

Feedthrough . . . . . . . . . . . . . . . . . . . Three pass tubes (two water and one air)

4.8 mm (3/16 in.) OD tubing with two

Microdot coax connectors

(see section 1.8.3 on page 1-25)

Vacuum tight braze or weld joint or

connectors for the water tubes

(welded connections or connections using

Ultra-Torr® O-ring compression fittings may

be provided by INFICON if

sensor/feedthrough combination is

ordered, see Figure 1-3 on page 1-5)

Other . . . . . . . . . . . . . . . . . . . . . . . . Two XIUs or oscillators designed to interface

with the deposition controller or one XIU or

oscillator and one CrystalTwo switch

(not compatible with all controllers/monitors)

The cable length from the crystal to the

oscillator should not exceed 101.6 cm

(40 in.) unless a ModeLock instrument is

used. Refer to the controller/monitor

operating manual for cable length limitations.

Solenoid valve assembly for air,

PN 750-420-G1

(see section 3.1 on page 3-1)

Water Flow Rate. . . . . . . . . . . . . . . . Minimum water flow 150 to 200 cm

/min,

30°C maximum

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